ATC-B-3400-H
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PVD / Sputtering概要（Overview）
ATC-B-3400-H. Extended process side sputtering batch coater designed for a proprietary application requiring 40-50 thousand layers per run. Custom AJA STXL-EO (extended operation) magnetrons were designed to prevent aborted processing due to source shorting. This system will process (8) 6" substrates or hundreds of smaller substrates per batch.
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