概要（Overview）

Anatech HUMMER 6.2 performs sputter coating, a cold process in which ions impacting a metal source dislodge metal atoms. The atoms disperse throughout the process chamber to uniformly coat irregularly shaped specimens without thermal damage. Sputter coating produces high quality coatings whose thickness is repeatable and easily controlled. Cold, fast sputter rates require less time, giving you more time for microscope examinations.