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NIMBUS 300
カテゴリ
PVD / Sputtering概要（Overview）
The Nimbus is a high throughput sputter deposition system. The unique and patented architecture incorporates the essential process steps in three vacuum chambers linked by a unique substrate transport system. This small footprint system, with ease of maintenance designed in, stands out in the market as providing outstanding cost of ownership. Nimbus 300 - robotic wafer handling 100 to 200 mm.
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