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693
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PVD / Sputtering概要（Overview）
The MRC 693 is a sputtering system of the TES-600 Fast Cycle Load Lock variety that has undergone a complete rebuild by Technical Engineering Services (TES). It boasts updated software, a flat screen monitor from Planar, a Pinnacle II DC Power Supply from Advanced Energy, and control software and hardware from GE Fanuc System Automation. Additionally, it comes equipped with an RF Power Supply and a Matching Network.
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