CS-200
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PVD / Sputtering概要(Overview)
The CS-200 is a sputtering system equipped with a 4-inch Magnetron cathode for various target materials. It is suitable for research and development, as well as small and medium-scale volume production. The system is designed for high-performance and high reliability sputtering, based on ULVAC’s extensive experience and sputtering technology portfolio. It is an ideal choice for those looking for a reliable and versatile sputtering system.
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