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6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
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6" Fab For Sale from Moov - Click Here to Learn More
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SIV-200S

カテゴリ
PVD / Sputtering
概要(Overview)

The SIV inline system is a PVD tool that can deposit LCO, LPO and ITO onto panels with a substrate size of up to 1,000mm x 1,000mm. The maximum substrate size is 500mm. It has an RTA module integrated and a special designed chamber for LCO and LPO deposition. The tool is equipped with a special cathode for particle reduction and can deliver high quality/density LCO/LPO target. The system can perform pass-by or continuous deposition and can also deposit ITO.

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