説明
Condition: Complete / Working Status: Installed in fab構成
Novellus / Varian 3290 Sputtering System Configured: 150mm Process: Titanium 2 Titanium chambers station RF:NA station 1~4:Titanium normally Process: Station 1 (RF) = NA; Stations 2-4 = Titanium HEATER: Stations 1-4 = Y Heater controller: Stations 1-4 = Euro 919 Inner p.s.: Station 1 = NA; Stations 2-4 = 6KW Outer p.s.: Station 1 = NA; Stations 2-4 = 12KW MAGNET P.S.: Station1 = NA; Stations 2-4 = HP6286A Shutter: Station 1 = NA; Stations 2-4 = Y Cryo pump: CTI Torr 8 RF turbo pump: NA UPGRADE: FLOPPY DRIVER TO CF DRIVER MODIFY: UTILITY BOX ASSY Station argon pipeOEMモデルの説明
提供なしドキュメント
NOVELLUS / VARIAN
3290
検証済み
カテゴリ
PVD / Sputtering
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
112434
ウェーハサイズ：
6"/150mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
NOVELLUS / VARIAN
3290
カテゴリ
PVD / Sputtering
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
112434
ウェーハサイズ：
6"/150mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available