概要（Overview）

SPECTOR is a large area ion beam deposition system designed for optical coating. It combines the high quality of ion beam film with the ability to handle batch sizes similar to those of e-beam systems. This system offers several advantages, including material uniformity across 400mm planets, which ensures maximum product yield. The high current RF ion sources provide excellent deposition rates, and the system offers maximum product flexibility through its support for large substrates and palettes.