AIX G5 WW C Planetary Reactor for 150 mm SiC 

The AIXTRON Group provides deposition equipment to the semiconductor industry. They are used for a wide range of manufacturing high-performance components for electronic and optoelectronic applications based on compound or organic semiconductor materials. These components are used in a variety of innovative applications, technologies and industries. These include, for example, LED and display technology, data transmission, sensor technology, energy management and conversion, communication, signal and lighting technology, and many other sophisticated high-tech applications.

AIXTRON

AIX G5 WW C

(1) AIX G5 WW C Planetary Reactor. Including computer control system, process start up, and qualifications
(1) Gas Handling System
(1) Process Control
(1) Gas Purification
(1) Extensions
(1) Automation


Spec Sheet - AIXTRON AIX G5 WW C .pdf

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AIX G5 WW C

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