概要（Overview）

The CDE ResMap 178 is a precision instrument for measuring the sheet resistivity of a conductive media (metal and semiconductor applications). It is a table top model with manual wafer load and can measure wafer sizes from 2” to 8”. It has become an industry standard for cost effective resistivity measurement. The CDE ResMap 178 has an accuracy of 0.5% and a repeatability of 0.02% static and 0.1% dynamic. The CDE ResMap 178 has a resistivity range of 2mOhm/Square to 5MOhm/square. The CDE ResMap 178 has a maximum throughput of 1 minute per wafer (49 sites).