説明
RS measuring machine構成
構成なしOEMモデルの説明
The OmniMap RS75 is a four-point probe series that offers precise sheet resistance measurements for monitor wafers. It is faster than existing systems and is suitable for a variety of semiconductor process monitoring applications, including ion implantation, metal deposition, CMP, diffusion, polysilicon, epi, RTP, and bulk silicon. The system can process over 100 wafers per hour when conducting a five-site test on 200 mm wafers, with temperature compensation and flat alignment. A 49-site contour map with temperature compensation can be completed on a manually loaded test wafer in less than sixty seconds. This makes the OmniMap RS75 a production-worthy tool for sheet resistance mapping.ドキュメント
ドキュメントなし
KLA
RS75
検証済み
カテゴリ
Resistivity / Four Point Probe
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
112618
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
RS75
カテゴリ
Resistivity / Four Point Probe
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
112618
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
RS measuring machine構成
構成なしOEMモデルの説明
The OmniMap RS75 is a four-point probe series that offers precise sheet resistance measurements for monitor wafers. It is faster than existing systems and is suitable for a variety of semiconductor process monitoring applications, including ion implantation, metal deposition, CMP, diffusion, polysilicon, epi, RTP, and bulk silicon. The system can process over 100 wafers per hour when conducting a five-site test on 200 mm wafers, with temperature compensation and flat alignment. A 49-site contour map with temperature compensation can be completed on a manually loaded test wafer in less than sixty seconds. This makes the OmniMap RS75 a production-worthy tool for sheet resistance mapping.ドキュメント
ドキュメントなし