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KLA RS35
    説明
    Tencor / Prometrix RS 35 (RS35) 4PP *. Refurbished *. Installed in Clean-room
    構成
    *. Process: wafer Sheet Resistance measurement *. Measurement perfomance: - 4 Point Probe check surface on Silicon wafer - Measurement range <5 mohm/sq to > 5 Megohm/sq - Routine check 1-30 sites programmable - Counter/ 3-D map, Diameter scan 49,81,121,225,361,441,625 sites - XY map up to 1200 sites programmable *. Measurement Specifications - Measurement repeatability <0.2% ( 1 Sigma) - Absolute accuracy based on NIST(NBS) standard wafers +-1% of NIST certified range *. Hardware configuration: - Radial Stage and Probe head Assembly - Electronics Card Cage ( CPU and I/O Chanel, Motor Controller, Display I/O, RS232 Part..) - Diagnostics Pannel - DC Power supply - Operator Console with keyboard *. Wafer Size: 2"~ 8" *. Software configuration: - Operation Software: StatTrax *. Utility & power - power requirements 115v 50/60hz - Required compressed Air 80 ~100 PSI , Vacuum : 25 mmHg
    OEMモデルの説明
    提供なし
    ドキュメント

    ドキュメントなし

    KLA

    RS35

    verified-listing-icon

    検証済み

    カテゴリ
    Resistivity / Four Point Probe

    最終検証: 60日以上前

    主なアイテムの詳細

    状態:

    Refurbished


    稼働ステータス:

    不明


    製品ID:

    66001


    ウェーハサイズ:

    8"/200mm


    ヴィンテージ:

    1998


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    同様のリスト
    すべて表示
    KLA RS35

    KLA

    RS35

    Resistivity / Four Point Probe
    ヴィンテージ: 1998状態: 改修済み
    最終確認60日以上前

    KLA

    RS35

    verified-listing-icon
    検証済み
    カテゴリ
    Resistivity / Four Point Probe
    最終検証: 60日以上前
    listing-photo-1991d9ffc107489d8d1d5ce04ce67711-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
    主なアイテムの詳細

    状態:

    Refurbished


    稼働ステータス:

    不明


    製品ID:

    66001


    ウェーハサイズ:

    8"/200mm


    ヴィンテージ:

    1998


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    説明
    Tencor / Prometrix RS 35 (RS35) 4PP *. Refurbished *. Installed in Clean-room
    構成
    *. Process: wafer Sheet Resistance measurement *. Measurement perfomance: - 4 Point Probe check surface on Silicon wafer - Measurement range <5 mohm/sq to > 5 Megohm/sq - Routine check 1-30 sites programmable - Counter/ 3-D map, Diameter scan 49,81,121,225,361,441,625 sites - XY map up to 1200 sites programmable *. Measurement Specifications - Measurement repeatability <0.2% ( 1 Sigma) - Absolute accuracy based on NIST(NBS) standard wafers +-1% of NIST certified range *. Hardware configuration: - Radial Stage and Probe head Assembly - Electronics Card Cage ( CPU and I/O Chanel, Motor Controller, Display I/O, RS232 Part..) - Diagnostics Pannel - DC Power supply - Operator Console with keyboard *. Wafer Size: 2"~ 8" *. Software configuration: - Operation Software: StatTrax *. Utility & power - power requirements 115v 50/60hz - Required compressed Air 80 ~100 PSI , Vacuum : 25 mmHg
    OEMモデルの説明
    提供なし
    ドキュメント

    ドキュメントなし

    同様のリスト
    すべて表示
    KLA RS35

    KLA

    RS35

    Resistivity / Four Point Probeヴィンテージ: 1998状態: 改修済み最終検証:60日以上前