概要（Overview）

The RT-8200 is a high-performance reticle inspection tool that offers high productivity and sensitivity. It is designed to work with all types of reticles, including those that use advanced techniques such as Optical Proximity Correction (OPC) and Phase Shift Mask (PSM). This means that the RT-8200 can effectively inspect reticles with complex patterns and structures, ensuring that they meet the highest standards of quality and performance. With its advanced capabilities, the RT-8200 is an essential tool for any semiconductor manufacturing process that requires precise and accurate reticle inspection.