説明

Single wafer metrology for Implant

構成

Laser not included Shutdown in 2019 Operating System: DOS

OEMモデルの説明

The TP-500 is a Therma-Probe product that uses a laser-based, nondestructive measurement technique for monitoring ion implantation. It provides improved product reliability by employing the modernized and field-proven platform of the Therma-Wave Opti-Probe 2600, and added pattern recognition and improved wafer throughput.