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CENTURA 5200 RTA
カテゴリ
RTP/RTA概要（Overview）
Rapid Thermal Annealing The Centura is Applied’s most versatile platform. Launched in 1992, over 8,000 Centura systems have been shipped to customers around the world. For ≤200mm fabrication the applications supported include CVD, epitaxy, etch, plasma nitridation and RTP
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