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説明
Item Description Dimension Qty 1 Main Frame 77 X 99 X 90 1 2 System Controller 36 X 26 X 86 1 3 A/C Rack 38 X 28 X 78 1 4 Monitor Rack, Tall #1 22 X 22 X 78 1 5 Monitor Rack, Tall #2 22 X 22 X 78 1 6 Tote #1, (Large Pallet Tote) 41 X 49 X 37 1 Inventory Tote #1 Contents Part Number Quantity 0150-76873 18 0150-00939 2 0150-00938 2 0150-02355 2 0150-00931 1 0150-60131 1 0150-35792 1 0150-76758 1 Video Cable for Switch Box 1 0150-76739 1 0150-97052 1 0150-01027 1 0150-70761 1 Power cable to recepticle box on video monitor 1 0150-01031 1 0150-76739 1 0150-76740 1 118468-G3 1 CH A Throttle valve serial # 000366820 1 0150-01106 1 0150-97052 2 0150-01111 1 SCR power cable 16 SCR Ground cable 2 Pump interface cable 2 VME AC power cable 1 0150-50131 1 0150-60559 1 0150-76213 1 KF 50 centering ring 3 KF 40 centering ring 1 Tote #2 Contents Part Number Quantity VGA Monitor with base 1 VGA Monitor without base 1構成
構成なしOEMモデルの説明
The Centura RTP is a rapid thermal processing system offered by the Thermal Processing Organization. It is one of the most successful systems in the industry and has been recognized as the best-selling RTP system in the world by VLSI Research and Dataquest. The system is noted for its superb temperature control, performing standalone and integrated rapid thermal processing for silicide and implant anneal, oxidation, and nitridation for logic and DRAM devices down to 0.18mm. The RTP Centura’s industry-leading within-wafer and wafer-to-wafer uniformity provides dramatically successful uniformity of 5°C, 3s. Superior temperature control is also provided by the unique patented Honeycomb Source lamp module and emissivity-independent Emissometer temperature measurement tool. In addition to RTP processes, the Thermal Processing Organization also offers other high-temperature depositions such as integrated polysilicon, tungsten silicide, and silicon nitride.ドキュメント
カテゴリ
RTP/RTA
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
116658
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
APPLIED MATERIALS (AMAT)
CENTURA RTP
カテゴリ
RTP/RTA
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
116658
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available