概要（Overview）

The main difference between the Vantage Radiance and Radiance Centura is the platform they are built on. Unlike Applied’s previous Radiance RTP tools which were modules built around its Centura cluster tool platform, Vantage is simply two RTP chambers linked directly to a factory interface and track robot. The result is a much smaller, simpler, high-throughput tool with a footprint of 51 square feet.