CENTURA VANTAGE
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RTP/RTA概要（Overview）
Applied Materials Vantage platform serves single-wafer rapid thermal processing (RTP) chambers comprising RadOx for thermal oxidation, RadiancePlus and Vulcan for spike and soak anneals, and Astra for millisecond anneals. It accommodates two chambers and was designed to optimize cost and footprint. Vantage spike anneal and thermal oxidation systems are the industry leaders in their technologies.
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