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8800
カテゴリ
RTP/RTA概要（Overview）
The 8800 RTP system is a workhorse RTP tool developed specifically to address 0.25 micron process requirements. This advanced 200 mm single wafer RTP tool incorporates a number of proprietary design features that dramatically improve temperature uniformity and repeatability, while significantly improving throughput.
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1
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検査、保証、鑑定、ロジスティクス
