HEATPULSE 8800
カテゴリ
RTP/RTA概要(Overview)
The Heatpulse 8800 system is a single-wafer, cassette-to-cassette rapid thermal processor, capable of processing in inert or corrosive ambient. The system is built for the production environment.Process Chamber accommodates 125mm to 200mm wafers, with standard slip-free ring and wafer aligner.
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