概要（Overview）

4" high power air bearing spindle, up to 2.5KW at 30krpm. DC Brushless motor provides close-loop speed control. Covering up to 12" round products, 12" x 9" square substrates with frame or 12" x 12" chuck without frame. The system is equipped with close-loop turn table, optimized for multi-angle dicing suitable for a variety of products such as: Ceramic substrates, Alumina, Hybrids, Thick film devices and more.