WBF8000
概要(Overview)
This system is a device that converts scribed wafers into chips with break blades. Alignment is performed automatically by image processing. In addition, it is a fully automatic specification that automatically feeds wafers from a cassette containing rings. 1) General-purpose material wafer 2) Wafer size 8 inches or less 3) Chip size 200 μm square or more Aspect ratio 1.5 or more 4) Workpiece mounting accuracy ±3 mm or less
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