概要（Overview）

The Veeco Optium ADS-160 is a high-precision, ESD-safe dicing system for thin film magnetic head wafers, featuring a SEMI-S22 standard compliant platform, gang blade capability, automated bar handling, and a high-speed axis with multiple spindles. It has a rigid structure with a cutting area up to 350mm, includes open programming with a Windows GUI and touchscreen, and is designed for automation integration. Developed by a leader in TFMH process tools, it enhances productivity and precision in wafer dicing.