E3630
カテゴリ
SEM / FIB概要(Overview)
Multi Vision Metrology Scanning Electron Microscope In addition to its high-functionality CD-SEM features, the E3630 makes 3D imaging and measurement at the nanometer level, in real time and in a non-destructive way, possible. The E3630 significantly contributes to reducing TAT in R&D and production for many processes that require high-precision and/or 3D analysis.
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