概要（Overview）

The FEI Quanta 3D FEG is a dual beam system that combines a field emission scanning electron column and an ion column with a Gallium ion source. It is equipped with multiple analytical and manipulative tools, allowing for the application of different techniques and methods within the same chamber. The system features three imaging modes: high vacuum, low vacuum, and ESEM, and is equipped with high-resolution imaging and surface analysis methodologies such as BSE, SE, ISE, and EDS. The ion and electron beam can be used in combination with a gas injection system to deposit thin layers of Pt to protect an exploration site. The instrument also has a Peltier cooling stage and an automated nanomanipulator from Omniprobe.