概要（Overview）

The FEI Nova NanoLab 400 is a dual beam device that comes with both a Focused Ion Beam (FIB) and a Field Emission Scanning Electron Microscope (SEM). It is designed to provide high-resolution imaging and analysis, and features a motorized stage for improved results. Another model from FEI, the Helios NanoLab 400, has a five-axis stage that can move 100 mm in both the X and Y directions. Its all-axis piezo drive and chamber mounting offer top-of-the-line stage repeatability. Samples as large as 100 mm can be loaded through the load lock for maximum efficiency.