概要（Overview）

The FEI Quanta 200 3D is a type of environmental scanning electron microscope (ESEM) that uses a tungsten cathode to generate electrons. It is known as an “environmental” microscope because it can operate under varying pressure conditions and even at 100% humidity. This microscope is capable of achieving a resolution of 3.5 nm when operating at 30 kV in both high vacuum and ESEM modes, and a resolution of less than 15 nm when operating at 3 kV in low vacuum mode. The FEI Quanta 200 3D has an adjustable accelerating voltage range from 200 V to 30 kV, and can achieve magnifications ranging from 10X to 300,000X. Additionally, the microscope is equipped with five motorized axes (x = 50 mm, y = 50 mm, z = 25 mm, tilt (-10 to 60 degrees), and rotation (n x 360 degrees)) for precise sample positioning and manipulation.