概要（Overview）

The FEI Quanta 200 is a high-performance Scanning Electron Microscope (SEM) that is versatile and can accommodate a wide range of samples. It has three modes: high vacuum, low vacuum, and ESEM (Environmental Scanning Electron Microscopy). The Quanta 200 FEGSEM (Field Emission Gun Scanning Electron Microscope) system is optimized for OIM (Orientation Imaging by Electron Backscatter Diffraction) microscopy. The chamber and stage of the Quanta 200 FEG have high tilt capabilities, ranging from -5° to +80°, which enables optimized EBSD (Electron Backscatter Diffraction) analysis.