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STRATA 205
カテゴリ
SEM / FIB概要（Overview）
The FEI Strata 205 is a FIB microscope that employs a gallium liquid metal ion source. The microscope has an accelerating voltage range of 5 kV to 20 kV, a resolution of 7 nm, and a beam current range of 1 pA to 20 nA. The system is equipped with a 5-axis motorized table and a gas injection system for depositing conductors and insulators, as well as etching samples. The FEI Strata 205 also features IntelliTune for automated detection depending on the task, user-friendly automated mapping software, and automated image processing for improved results.
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