概要（Overview）

The FEI XL830 is a DualBeam FIB/SEM system that offers high-resolution SEM imaging and quick, accurate ion milling. The SEM column of the DualBeam XL830 workstation delivers 3-nm resolution within the range of 1-30 kV, while the electron column features balanced-field, in-lens detection that provides detailed topographical information, improved visibility down holes, and enhanced imaging of grain boundaries.