概要（Overview）

The Thermo Scientific™ Helios 5 FX™ DualBeam continues the Helios legacy to the fifth generation combining the innovative Elstar™ with UC+ technology electron column for high-resolution and high materials contrast imaging, in-lens S/TEM 4 for 3Å in-situ low kV S/TEM imaging and the superior low kV performing Phoenix™ ion column for fast, precise and sub-nm damage sample preparation. In addition to the industry leading SEM and FIB columns, the Helios 5 FX incorporates a suite of state-of-the-art technologies which enable simple and consistent sample preparation (for high resolution S/TEM imaging and/or Atom Probe microscopy) on even the most challenging samples.