概要（Overview）

The Helios NanoLab 660 is a state-of-the-art DualBeam system developed by FEI. It combines the power of both ion and electron beams to provide FIB (Focused Ion Beam) and SEM (Scanning Electron Microscopy) capabilities in a single machine. This system is designed to provide detailed, multi-dimensional insights at a sub-nanometer resolution. It incorporates the latest advances in field emission SEM (FESEM) and focused ion beam (FIB) technologies, allowing for their combined use. As the 11th DualBeam platform from FEI, the Helios NanoLab 660 opens up new possibilities for extreme high-resolution 2D and 3D characterization, nanoprototyping, and high-quality sample preparation.