概要（Overview）

Hitachi High-Technologies Corporation has developed the SU6600 Schottky Field Emission Analytical SEM to meet the increased demand for analytical, high resolution microscopy. It utilizes advanced Variable Pressure (VP) technology and an improved Schottky field emission electron source that provides exceptional imaging and high probe current with great stability. It allows accommodation of EDX, WDX and EBSP' systems for versatile material analyses in addition to high resolution imaging and materials characterization. The SU6600 provides unparalleled imag­ing and EDX and EBSP analysis of challenging samples without the need for sample preparations such as metal coating or special grounding techniques.