概要（Overview）

The JSM-7600F is a state-of-the-art Scanning Electron Microscope (SEM) that combines ultra-high-resolution imaging with enhanced analytical capabilities. It boasts a resolution of 1.5 nm at 1 kV in GB mode and 1.0 nm at 15 kV, with an accelerating voltage ranging from 0.1 kV to 30 kV. The microscope offers a magnification range from 25x to 1,000,000x, providing ultra-high-resolution imaging comparable to cold FEG SEM. This SEM is equipped with an in-lens thermal FE gun and an aperture angle control lens, ensuring optimum beam projection regardless of the probe current level. It also offers robust analytical capabilities at a maximum probe current of 200 nA at 15 kV, supporting various types of sample analysis such as WDS and EDC. The JSM-7600F features an r-filter for controlling the energy selection and image mixture rate for secondary electron and backscattered electron images. Its Gentle Beam mode minimizes beam damage for ultra-surface imaging. Designed with energy efficiency and environmental friendliness in mind, this powerful FE-SEM is a valuable tool for any laboratory.