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AURIGA 60

カテゴリ
SEM / FIB
概要(Overview)

To address these demands, the AURIGA CrossBeam workstation series has been designed to accommodate an optimum number of accessories/detectors only depending on the size of the vacuum chamber. Due to a large 6” stage vacuum chamber, the AURIGA 60 essentially broadens the application spectrum of the Carl Zeiss CrossBeam technology. Up to 23 analytical or other accessories for diverse chemical or physical experiments can be mounted on the chamber, e.g. different detectors or a cryogenic transfer unit.

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