概要（Overview）

The 1540EsB CrossBeam® is a powerful tool that combines a fully integrated Energy and angle selective Backscattered electron (EsB) detector. This instrument offers ultra high resolution for surface sensitive SE imaging and compositional information through BSE imaging. The new EsB detection principle features an integrated filtering grid to enhance the image quality and requires no additional adjustments. The EsB detection principle is less sensitive to edge contrast and charging effects, which increases the accuracy in measurements of interfaces, particles, and features.