ULTRA PLUS
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SEM / FIB概要(Overview)
Zeiss Ultra Plus allow you to capture, analyze and supplement high-resolution images to get total information out of your sample. The complete detection system of the Ultra Plus combines a high-tech Gemini FE-SEM column with various detectors: the In-lens & SE-Detector for high resolution images, the in-lens Energy selective Backscatter Detector (EsB) & Annular Backscatter Detector (AsB) for impressive material contrast of any samples, and Energy Dispersive Spectroscopy (EDS) for elemental analysis
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