概要（Overview）

HITACHI S 9200S is SEM & TEM system. The HITACHI 9200S can be used with 8” wafer size. It was equipped for CD Scanning electron microscope (SEM) with 8” system size. Its comes with open cassette display monitor system with UPS power rack. Its required power supply for 3 phase is 230VAC (6Kva) with 50Hz frequency. Its range of measurement wavelength is 1um to 2.0um.