概要（Overview）

The JSM-6320F is a high-performance, ultra-high resolution Field Emission Scanning Electron Microscope (FE-SEM) that operates at low to medium accelerating voltages. It features a “semi-in-lens” design and a “through-the-lens” detector, delivering a high resolution of 1.2nm (or 2.5nm at 1kV). The microscope can accommodate specimens up to 100mm in diameter in its chamber. The device is equipped with a JEOL conical FE electron gun and a double zoom condenser lens, ensuring a stable and high-performance electron optical system. It also offers dual imaging capabilities, providing rapid response with analog imaging and superior image quality with digital imaging. The JSM-6320F is user-friendly, featuring various auto functions for ease of operation. Its digital image memory enhances its functionality by allowing image storage, comparisons, and noise reduction through accumulated TV rate images. This makes it an ideal tool for detailed examination and analysis in various fields.