AURIGA
カテゴリ
SEM概要（Overview）
Based on a fully modular concept, the AURIGA CrossBeam workstations can be tailored to the individual customer’s applications – today and in the future. Starting with a high-performance FE-SEM platform, the system can be upgraded with a wide variety of hardware and software options, such as FIB, GIS, local charge compensation system and different detectors.
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