概要（Overview）

The QS-300 is a bench top FT-IR system designed for the analysis of semiconductor material in Fabs and R&D facilities. It features high performance optics with maximum optical throughput, providing precise and accurate measurements in both reflection and transmission modes. The system also has an innovative sample compartment that can accommodate single wafers or slugs of 3 to 200mm, as well as non-standard shape and size silicon substrates. This makes it a versatile tool for analyzing a wide range of semiconductor materials.