概要（Overview）

The QS-312 system is a state-of-the-art bench top FT-IR system designed for semiconductor material analysis of 300mm wafers and slugs. It is the latest version of the successful field-proven model QS-300 technology, with the added capability of handling 300mm material. The system can handle standard wafers as well as 2mm slugs in the diameter range of 3 to 300mm, making it a versatile and powerful tool for semiconductor material analysis.