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QS-408M
概要（Overview）
The QS-408M is a manual wafer loading FT-IR system designed for semiconductor material characterization. It incorporates an X-Y stage that allows for unlimited user-defined mapping patterns and contour maps to be generated. The system can accommodate single wafers or slugs of 3" to 200mm, as well as non-standard shape and size silicon substrates. The QS-408M software has communication capability to host computers under the SECS I and II protocols. This makes it a versatile and powerful tool for semiconductor material analysis.
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