概要（Overview）

The QS-500 is a state-of-the-art FT-IR instrument designed for non-destructive analysis of semiconductor wafers. It is fully automated and ideal for use in both Fabs and R&D facilities. The high-performance optics provide maximum throughput, ensuring precise and accurate measurements. The instrument also features automatic computer selectable reflection and transmission modes. The robotic wafer handler, with an integrated pre-aligner, provides a compact footprint and the ability to sort using two cassette stations. Additionally, the system incorporates an X-Y stage, allowing for unlimited user-defined mapping patterns on samples and the generation of contour maps. Overall, the QS-500 is a powerful tool for semiconductor wafer analysis.