概要（Overview）

QSFRS, or the Full Rod Oxygen Analyzer, is an automatic ingot scanning FT-IR spectrometer system designed to determine impurities in bulk silicon in crystal growing areas. It is capable of determining interstitial oxygen impurities in bulk silicon ingots and includes the ability to calibrate, correct, and monitor daily analysis using SPC control standards. QSFRS has an optional built-in stage for smaller pieces and a mobile cart for sampling whole rods. It also has built-in safety interlocks and signal lights to meet production environment safety requirements. This system is a valuable tool for ensuring the purity of silicon ingots in the crystal growing process.