概要（Overview）

The Cameca IMS 4F is the successor to the IMS 3F and contains all the features of its predecessor plus improvements of the basic instrument as well as new accessories. It is an ion microprobe that is based on the phenomenon of ion-induced sputtering of a solid sample by an energetic primary ion beam, typically consisting of oxygen or cesium ions at beam energy of 5 – 20 keV. It is a tool for investigating isotopic composition in the chemical, material, geological and biological sciences and can detect all elements (H to U) in depth profiling, surface, bulk and microanalysis modes.