概要（Overview）

With the TOF.SIMS 5 IONTOF offers a field proven and efficient TOF-SIMS tool which still outperforms most of its external rivals. The current design guarantees good performance in all fields of SIMS applications, making it an extremely attractive SIMS tool for customers in industry and academia. Due to the modular design, the instruments can be configured with a selection of optimised ion guns, sample preparation facilities and a variety of special accessories in order to address even the most challenging analytical tasks. The computer control of all instrument functions and parameters ensures ease-of-use and a high level of automation. The basic instrument is equipped with a reflectron TOF analyser giving high secondary ion transmission with high mass resolution, a sample chamber with a 5-axis manipulator (x, y, z, rotation and tilt) for flexible navigation, a fast entry load-lock, charge compensation for the analysis of insulators, a secondary electron detector for SEM imaging, a state-of-the-art vacuum system, and an extensive computer package for automation and data handling.