概要（Overview）

The PHI ESCA 5500 is an X-ray Photoelectron Spectroscopy (XPS) system, also known as an Electron Spectroscopy for Chemical Analysis (ESCA) instrument. Manufactured by Physical Electronics (PHI), this system is designed for surface analysis, providing quantitative elemental and chemical state information from the topmost layers of a material. The PHI 5500 model is part of PHI's 5000 series of multi-technique ESCA systems, which have set standards for performance in traditional ESCA applications.