During 2000 Semitool introduced Scepter line of spray solvent tools and rinser/dryers. The Scepter products have double the wafer capacity of our standard SST and rinser/dryers while using approximately the same amount of clean room space. This allows an existing fab the ability to increase throughput without adding space. The Scepter is designed for wafers up to 300mm in size.

Designed, developed & manufactured high performance and precision chemical processing equipment. Products included electrochemical deposition systems for electroplating copper, gold, solder and other metals; surface preparation systems for cleaning, stripping and etching silicon wafers; and wafer transport container cleaning systems.

Scepter SRD

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