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市場 > Steppers & Scanners > ASML > PAS 5500/200

PAS 5500/200

概要(Overview)

The PAS 5500/200 was the first stepper to incorporate ASML’s revolutionary AERIAL™ Illuminator, a versatile component that provides both the flexibility to switch between conventional and off-axis illumination modes and the high intensity to enable economical IC mass production. The i-Line Stepper combines 0.35 micron resolution with outstanding overlay performance. The 5500/200 is among ASML’s most successful types built, and has later been succeeded by an improved version, the PAS 5500/250.

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